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"Advanced backside failure analysis in 65 nm CMOS technology."

Stephane Bianic et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.07.076

access: closed

type: Journal Article

metadata version: 2020-02-22

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Stephane Bianic, Stéphanie Allemand, Grégory Kerrosa, Pascal Scafidi, Didier Renard:
Advanced backside failure analysis in 65 nm CMOS technology. Microelectron. Reliab. 47(9-11): 1550-1554 (2007)

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