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"Adhesion of arbitrary-shaped thin-film microstructures."

Dhruv Bhate, Martin L. Dunn (2007)

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DOI: 10.1016/J.MICROREL.2007.04.011

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - journals/mr/BhateD07
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  - https://dblp.org/rec/journals/mr/BhateD07
Dhruv Bhate, Martin L. Dunn:
Adhesion of arbitrary-shaped thin-film microstructures. Microelectron. Reliab. 47(12): 2014-2024 (2007)

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