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"A review of ULSI failure analysis techniques for DRAMs 1. Defect ..."

Guenther Benstetter, Michael W. Ruprecht, Douglas B. Hunt (2002)

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DOI: 10.1016/S0026-2714(02)00002-1

access: closed

type: Journal Article

metadata version: 2022-12-07

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Guenther Benstetter, Michael W. Ruprecht, Douglas B. Hunt:
A review of ULSI failure analysis techniques for DRAMs 1. Defect localization and verification. Microelectron. Reliab. 42(3): 307-316 (2002)

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