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"3D failure analysis in depth profiles of sequentially made FIB cuts."

C. N. Mc Auley et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.07.032

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mr/AuleyRKK07
C. N. Mc Auley, Andreas Rummel, F. W. Keating, Stephan Kleindiek:
3D failure analysis in depth profiles of sequentially made FIB cuts. Microelectron. Reliab. 47(9-11): 1595-1598 (2007)

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