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"High-resolution SILC measurements of thin SiO2 at ultra low ..."

Stefano Aresu et al. (2002)

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DOI: 10.1016/S0026-2714(02)00175-0

access: closed

type: Journal Article

metadata version: 2023-09-30

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Stefano Aresu, Ward De Ceuninck, R. Dreesen, Kris Croes, E. Andries, Jean Manca, Luc De Schepper, Robin Degraeve, Ben Kaczer, Marc D'Olieslaeger:
High-resolution SILC measurements of thin SiO₂ at ultra low voltages. Microelectron. Reliab. 42(9-11): 1485-1489 (2002)

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