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"Fabrication of 128×128 element optical switch array by ..."

S. B. Wang et al. (2005)

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DOI: 10.1016/J.MEJO.2004.06.024

access: closed

type: Journal Article

metadata version: 2020-02-22

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S. B. Wang, S. B. Zhou, G. Huang, B. F. Xiong, S. H. Chen, X. J. Yi:
Fabrication of 128×128 element optical switch array by micromachining technology. Microelectron. J. 36(1): 91-95 (2005)

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