"Diaphragm design guidelines and an optical pressure sensor based on MEMS ..."

Xiaodong Wang et al. (2006)

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DOI: 10.1016/J.MEJO.2005.06.015

access: closed

type: Journal Article

metadata version: 2020-02-22

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Xiaodong Wang, Baoqing Li, Onofrio L. Russo, Harry T. Roman, Ken K. Chin, Kenneth R. Farmer:
Diaphragm design guidelines and an optical pressure sensor based on MEMS technique. Microelectron. J. 37(1): 50-56 (2006)

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