"Generation lifetime improvement on MOS capacitor by fast neutron enhanced ..."

Wu-Yih Uen et al. (2003)

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DOI: 10.1016/S0026-2692(02)00152-0

access: closed

type: Journal Article

metadata version: 2020-02-22

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Wu-Yih Uen, Shan-Ming Lan, Sen-Mao Liao, Jing-Ting Chiou:
Generation lifetime improvement on MOS capacitor by fast neutron enhanced intrinsic gettering technique. Microelectron. J. 34(2): 127-131 (2003)

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