"Kinetics of hydride disintegration in a 2D Si channel formation by the ..."

L. K. Orlov et al. (2005)

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DOI: 10.1016/J.MEJO.2005.02.106

access: closed

type: Journal Article

metadata version: 2020-02-22

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L. K. Orlov, N. L. Ivina, A. V. Potapov, T. N. Smyslova, L. M. Vinogradsky, Z. J. Horvath:
Kinetics of hydride disintegration in a 2D Si channel formation by the Si-GeH₄ MBE and demonstration of a Si/SiGe interface blurring in electrical characteristics of heterostructures. Microelectron. J. 36(3-6): 518-521 (2005)

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