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"Impact of etch angles on cell characteristics in 3D NAND flash memory."
Young-Taek Oh et al. (2018)
- Young-Taek Oh, Kyu-Beom Kim
, Sang-Hoon Shin, Hahng Sim, Nguyen Van Toan
, Takahito Ono
, Yunheub Song:
Impact of etch angles on cell characteristics in 3D NAND flash memory. Microelectron. J. 79: 1-6 (2018)
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