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"Formation of a buried collector layer in RF-bipolar devices by ion ..."

Hans Norström, Ted Johansson (2006)

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DOI: 10.1016/J.MEJO.2006.06.009

access: closed

type: Journal Article

metadata version: 2022-04-09

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Hans Norström, Ted Johansson:
Formation of a buried collector layer in RF-bipolar devices by ion implantation. Microelectron. J. 37(11): 1366-1371 (2006)

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