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"The influence of vertical deflection of the supports in modeling squeeze ..."

Hamid Moeenfard, Mohammad Taghi Ahmadian (2012)

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DOI: 10.1016/J.MEJO.2012.05.006

access: closed

type: Journal Article

metadata version: 2020-02-22

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Hamid Moeenfard, Mohammad Taghi Ahmadian:
The influence of vertical deflection of the supports in modeling squeeze film damping in torsional micromirrors. Microelectron. J. 43(8): 530-536 (2012)

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