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"Characterization analysis of quality factor, electro-mechanical coupling ..."
Shitao Lv et al. (2022)
- Shitao Lv, Zheng Zhu, Fei Long, Haiyan Sun, Chenguang Song, Aoyu Zhang, Fazeng Tan, Jicong Zhao:
Characterization analysis of quality factor, electro-mechanical coupling and spurious modes for AlN Lamb-wave resonators with fs > 2 GHz. Microelectron. J. 125: 105466 (2022)
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