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"Electrical and surface composition properties of phosphorus implantation ..."

Kuan-Ting Liu et al. (2006)

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DOI: 10.1016/J.MEJO.2005.05.026

access: closed

type: Journal Article

metadata version: 2020-02-22

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Kuan-Ting Liu, Y. K. Su, R. W. Chuang, S. J. Chang, Y. Horikoshi:
Electrical and surface composition properties of phosphorus implantation in Mg-doped GaN. Microelectron. J. 37(5): 417-420 (2006)

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