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"Patterning issues for the fabrication of sub-micron memory capacitors' ..."
Hyoun Woo Kim, Chang-Jin Kang (2003)
- Hyoun Woo Kim, Chang-Jin Kang:
Patterning issues for the fabrication of sub-micron memory capacitors' electrodes. Microelectron. J. 34(9): 779-783 (2003)
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