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"Theoretical and numerical investigation of a new 3-axis SU-8 MEMS ..."

Awatef Khlifi et al. (2022)

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DOI: 10.1016/J.MEJO.2022.105552

access: closed

type: Journal Article

metadata version: 2023-03-21

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Awatef Khlifi, Aftab Ahmed, Brahim Mezghani, Rajul Patkar, Pradeep Dixit, Fares Tounsi, Maryam Shojaei Baghini:
Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer. Microelectron. J. 128: 105552 (2022)

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