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"Integrated CNTs thin film for MEMS mechanical sensors."

Van Thanh Dau et al. (2010)

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DOI: 10.1016/J.MEJO.2010.07.012

access: closed

type: Journal Article

metadata version: 2023-09-05

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  - https://dblp.org/rec/journals/mj/DauYDTHS10
Van Thanh Dau, Takeo Yamada, Dzung Viet Dao, Bui Thanh Tung, Kenji Hata, Susumu Sugiyama:
Integrated CNTs thin film for MEMS mechanical sensors. Microelectron. J. 41(12): 860-864 (2010)

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