"Postprocessing, readout and packaging methods for integrated gas flow sensors."

Paolo Bruschi, Massimo Piotto, N. Bacci (2009)

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DOI: 10.1016/J.MEJO.2008.08.009

access: closed

type: Journal Article

metadata version: 2020-02-22

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Paolo Bruschi, Massimo Piotto, N. Bacci:
Postprocessing, readout and packaging methods for integrated gas flow sensors. Microelectron. J. 40(9): 1300-1307 (2009)

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