"Bulk micromachining of silicon in TMAH-based etchants for aluminum ..."

Kanishka Biswas et al. (2006)

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DOI: 10.1016/J.MEJO.2005.05.013

access: closed

type: Journal Article

metadata version: 2023-09-30

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Kanishka Biswas, Soumen K. Das, D. K. Maurya, S. Kal, S. K. Lahiri:
Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface. Microelectron. J. 37(4): 321-327 (2006)

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