"Fabrication of sharp silicon tips employing anisotropic wet etching and ..."

Marco Antonio Robert Alves, D. F. Takeuti, Edmundo S. Braga (2005)

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DOI: 10.1016/J.MEJO.2004.10.004

access: closed

type: Journal Article

metadata version: 2023-09-11

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Marco Antonio Robert Alves, D. F. Takeuti, Edmundo S. Braga:
Fabrication of sharp silicon tips employing anisotropic wet etching and reactive ion etching. Microelectron. J. 36(1): 51-54 (2005)

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