"MEMS piezoelectric micro power harvester physical parameter optimization, ..."

Mohd H. S. Alrashdan (2020)

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DOI: 10.1016/J.MEJO.2020.104894

access: open

type: Journal Article

metadata version: 2020-10-21

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Mohd H. S. Alrashdan:
MEMS piezoelectric micro power harvester physical parameter optimization, simulation, and fabrication for extremely low frequency and low vibration level applications. Microelectron. J. 104: 104894 (2020)

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