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ORCID"Design Optimization and Fabrication of High-Sensitivity SOI Pressure ..."
Jiahong Zhang et al. (2016)
- Jiahong Zhang, Yang Zhao, Yixian Ge, Min Li, Lijuan Yang, Xiaoli Mao:
Design Optimization and Fabrication of High-Sensitivity SOI Pressure Sensors with High Signal-to-Noise Ratios Based on Silicon Nanowire Piezoresistors. Micromachines 7(10): 187 (2016)
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