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"Research on the Piezoelectric Properties of AlN Thin Films for MEMS ..."

Meng Zhang et al. (2015)

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DOI: 10.3390/MI6091236

access: open

type: Journal Article

metadata version: 2019-10-19

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  - electronic edition via DOI (open access)
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  dblp key:
  - journals/micromachines/ZhangYSHZN15
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  persistent URL:
  - https://dblp.org/rec/journals/micromachines/ZhangYSHZN15
Meng Zhang, Jian Yang, Chaowei Si, Guowei Han, Yongmei Zhao, Jin Ning:
Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications. Micromachines 6(9): 1236-1248 (2015)

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