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ORCID"The Fringe-Capacitance of Etching Holes for CMOS-MEMS."
Yi-Ta Wang et al. (2015)
- Yi-Ta Wang, Yuh-Chung Hu, Wen-Chang Chu, Pei-Zen Chang:
The Fringe-Capacitance of Etching Holes for CMOS-MEMS. Micromachines 6(11): 1617-1628 (2015)
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