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"A Bi-Directional Out-of-Plane Actuator by Electrostatic Force."

Hao Ren et al. (2013)

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DOI: 10.3390/MI4040431

access: open

type: Journal Article

metadata version: 2018-08-14

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  dblp key:
  - journals/micromachines/RenWTY13
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  - https://dblp.org/rec/journals/micromachines/RenWTY13
Hao Ren, Weimin Wang, Fenggang Tao, Jun Yao:
A Bi-Directional Out-of-Plane Actuator by Electrostatic Force. Micromachines 4(4): 431-443 (2013)

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