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"Micromachining of AlN and Al₂O₃ Using Fiber Laser."

Florian Preusch, Benedikt Adelmann, Ralf Hellmann (2014)

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DOI: 10.3390/MI5041051

access: open

type: Journal Article

metadata version: 2018-08-14

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  dblp key:
  - journals/micromachines/PreuschAH14
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  persistent URL:
  - https://dblp.org/rec/journals/micromachines/PreuschAH14
Florian Preusch, Benedikt Adelmann, Ralf Hellmann:
Micromachining of AlN and Al₂O₃ Using Fiber Laser. Micromachines 5(4): 1051-1060 (2014)

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