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"A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated ..."

Joseph A. Potkay, Kensall D. Wise (2012)

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DOI: 10.3390/MI3020379

access: open

type: Journal Article

metadata version: 2018-08-14

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  dblp key:
  - journals/micromachines/PotkayW12
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  - https://dblp.org/rec/journals/micromachines/PotkayW12
Joseph A. Potkay, Kensall D. Wise:
A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing. Micromachines 3(2): 379-395 (2012)

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