"Measuring the Quality Factor in MEMS Devices."

Savas Ozdemir et al. (2015)

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DOI: 10.3390/MI6121466

access: open

type: Journal Article

metadata version: 2023-09-30

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  - journals/micromachines/OzdemirAGKSAY15
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  persistent URL:
  - https://dblp.org/rec/journals/micromachines/OzdemirAGKSAY15
Savas Ozdemir, Sohail Akhtar, Ozgur E. Gunal, Mahmoud E. Khater, Resul Saritas, Eihab M. Abdel-Rahman, Mustafa Yavuz:
Measuring the Quality Factor in MEMS Devices. Micromachines 6(12): 1935-1945 (2015)

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