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"Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically ..."

Darcy T. Haluzan et al. (2010)

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DOI: 10.3390/MI1020068

access: open

type: Journal Article

metadata version: 2018-08-14

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  - journals/micromachines/HaluzanKAB10
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  - https://dblp.org/rec/journals/micromachines/HaluzanKAB10
Darcy T. Haluzan, David M. Klymyshyn, Sven Achenbach, Martin Börner:
Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams. Micromachines 1(2): 68-81 (2010)

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