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"Back-End-of-Line Compatible Transistors for Monolithic 3-D Integration."

Suman Datta et al. (2019)

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DOI: 10.1109/MM.2019.2942978

access: closed

type: Journal Article

metadata version: 2023-09-30

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Suman Datta, Sourav Dutta, Benjamin Grisafe, Jeff Smith, Srivatsa Srinivasa, Huacheng Ye:
Back-End-of-Line Compatible Transistors for Monolithic 3-D Integration. IEEE Micro 39(6): 8-15 (2019)

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