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"An algorithm for smoothing three-dimensional Monte Carlo ion implantation ..."

Clemens Heitzinger, Andreas Hössinger, Siegfried Selberherr (2004)

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DOI: 10.1016/J.MATCOM.2003.11.010

access: closed

type: Journal Article

metadata version: 2020-03-04

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Clemens Heitzinger, Andreas Hössinger, Siegfried Selberherr:
An algorithm for smoothing three-dimensional Monte Carlo ion implantation simulation results. Math. Comput. Simul. 66(2-3): 219-230 (2004)

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