"Design and Analysis of 5-DOF Micro/nano-Positioning Stage."

Chao Lin et al. (2012)

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DOI: 10.4304/JSW.7.5.1038-1044

access: closed

type: Journal Article

metadata version: 2020-09-15

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Chao Lin, Xinhui Cui, Kai Cheng, Songsong Yu:
Design and Analysis of 5-DOF Micro/nano-Positioning Stage. J. Softw. 7(5): 1038-1044 (2012)

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