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"Multichannel 65 zF rms Resolution CMOS Monolithic Capacitive Sensor for ..."

Pietro Ciccarella et al. (2016)

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DOI: 10.1109/JSSC.2016.2607338

access: closed

type: Journal Article

metadata version: 2020-08-30

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Pietro Ciccarella, Marco Carminati, Marco Sampietro, Giorgio Ferrari:
Multichannel 65 zF rms Resolution CMOS Monolithic Capacitive Sensor for Counting Single Micrometer-Sized Airborne Particles on Chip. IEEE J. Solid State Circuits 51(11): 2545-2553 (2016)

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