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"Research on "Cylinder-Four-Beam" Microstructure Improvement of MEMS Bionic ..."

Zeming Jian et al. (2021)

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DOI: 10.1155/2021/5580390

access: open

type: Journal Article

metadata version: 2021-08-13

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  dblp key:
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  - https://dblp.org/rec/journals/js/JianHNLZ21
Zeming Jian, Yifan Huang, Lei Nie, Mengran Liu, Guojun Zhang:
Research on "Cylinder-Four-Beam" Microstructure Improvement of MEMS Bionic Vector Hydrophone. J. Sensors 2021: 5580390:1-5580390:11 (2021)

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