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"Experiments on the Release of CMOS-Micromachined Metal Layers."
Daniel Fernández, Jordi Ricart, Jordi Madrenas (2010)
- Daniel Fernández
, Jordi Ricart, Jordi Madrenas
:
Experiments on the Release of CMOS-Micromachined Metal Layers. J. Sensors 2010: 937301:1-937301:7 (2010)
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