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"Particle Detection for 100-nm Patterned Wafers by Evanescent Light ..."

Toshie Yoshioka, Takashi Miyoshi, Yasuhiro Takaya (2006)

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DOI: 10.20965/JRM.2006.P0705

access: closed

type: Journal Article

metadata version: 2020-04-01

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  - https://dblp.org/rec/journals/jrm/YoshiokaMT06
Toshie Yoshioka, Takashi Miyoshi, Yasuhiro Takaya:
Particle Detection for 100-nm Patterned Wafers by Evanescent Light Illumination - Analysis of Evanescent Light Scattering Using Finite-Difference Time-Domain Method -. J. Robotics Mechatronics 18(6): 705-713 (2006)

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