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"Scheduling cluster tools in wafer fabrication using candidate list and ..."

Seong Jin Yim, Doo Yong Lee (1999)

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DOI: 10.1023/A%3A1008904604531

access: closed

type: Journal Article

metadata version: 2020-09-24

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Seong Jin Yim, Doo Yong Lee:
Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing. J. Intell. Manuf. 10(6): 531-540 (1999)

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