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"CNN and ensemble learning based wafer map failure pattern recognition ..."

Minghao Piao, Cheng Hao Jin (2023)

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DOI: 10.1007/S10845-022-02023-X

access: closed

type: Journal Article

metadata version: 2023-10-14

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Minghao Piao, Cheng Hao Jin:
CNN and ensemble learning based wafer map failure pattern recognition based on local property based features. J. Intell. Manuf. 34(8): 3599-3621 (2023)

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