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"Advanced semiconductor fabrication process control using dual filter ..."
Hyo-Heon Ko et al. (2012)
- Hyo-Heon Ko, Jihyun Kim, Sang-Hoon Park, Jun-Geol Baek
, Sung-Shick Kim:
Advanced semiconductor fabrication process control using dual filter exponentially weighted moving average. J. Intell. Manuf. 23(3): 443-455 (2012)
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