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"A variational autoencoder for a semiconductor fault detection model robust ..."

Youngju Kim, Hoyeop Lee, Chang Ouk Kim (2023)

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DOI: 10.1007/S10845-021-01810-2

access: closed

type: Journal Article

metadata version: 2023-02-10

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Youngju Kim, Hoyeop Lee, Chang Ouk Kim:
A variational autoencoder for a semiconductor fault detection model robust to process drift due to incomplete maintenance. J. Intell. Manuf. 34(2): 529-540 (2023)

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