"Measuring relative performance of wafer fabrication operations: a case study."

Wen-Chih Chen, Chen-Fu Chien (2011)

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DOI: 10.1007/S10845-009-0302-X

access: closed

type: Journal Article

metadata version: 2022-10-04

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Wen-Chih Chen, Chen-Fu Chien:
Measuring relative performance of wafer fabrication operations: a case study. J. Intell. Manuf. 22(3): 447-457 (2011)

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