"Fault diagnosis in semiconductor manufacturing processes using a CNN-based ..."

Palanichamy Naveen et al. (2024)

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DOI: 10.3233/JIFS-231948

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type: Journal Article

metadata version: 2024-05-07

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Palanichamy Naveen, S. Nithyasai, Venkateshkumar Udayamoorthy, S. R. Ashok Kumar:
Fault diagnosis in semiconductor manufacturing processes using a CNN-based generative adversarial network1. J. Intell. Fuzzy Syst. 46(1): 1789-1800 (2024)

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