"Improvement of Resonance Characteristics by Post-Annealing in FBAR Devices."

Jae-Young Lee, Linh Mai, Gi-Wan Yoon (2007)

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DOI: —

access: open

type: Journal Article

metadata version: 2021-02-16

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Jae-Young Lee, Linh Mai, Gi-Wan Yoon:
Improvement of Resonance Characteristics by Post-Annealing in FBAR Devices. J. Inform. and Commun. Convergence Engineering 5(4): 320-323 (2007)

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