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"Semiconductor sidewall shape estimation."

Philip R. Bingham et al. (2004)

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DOI: 10.1117/1.1763586

access: closed

type: Journal Article

metadata version: 2021-07-25

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Philip R. Bingham, Jeffery R. Price, Kenneth W. Tobin, Thomas P. Karnowski:
Semiconductor sidewall shape estimation. J. Electronic Imaging 13(3): 474-485 (2004)

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