"Calculating the surface topography of integrated circuit wafers from SEM ..."

Timothy P. Ellison, Christopher J. Taylor (1991)

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DOI: 10.1016/0262-8856(91)90042-N

access: closed

type: Journal Article

metadata version: 2020-02-20

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Timothy P. Ellison, Christopher J. Taylor:
Calculating the surface topography of integrated circuit wafers from SEM images. Image Vis. Comput. 9(1): 3-9 (1991)

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