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"Accurate and steady control on trajectory tracking for the wafer transfer ..."

Yanjie Liu et al. (2010)

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DOI: 10.1108/01439911011081704

access: closed

type: Journal Article

metadata version: 2020-04-16

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Yanjie Liu, Yumei Cao, Lining Sun, XiaoFei Zheng:
Accurate and steady control on trajectory tracking for the wafer transfer robot. Ind. Robot 37(6): 552-561 (2010)

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