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"Computational Lithography Using Machine Learning Models."

Youngsoo Shin (2021)

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DOI: 10.2197/IPSJTSLDM.14.2

access: closed

type: Journal Article

metadata version: 2021-04-16

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Youngsoo Shin:
Computational Lithography Using Machine Learning Models. IPSJ Trans. Syst. LSI Des. Methodol. 14: 2-10 (2021)

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