Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"Implementing virtual metrology for in-line quality control in ..."

Jason Chao-Hsien Pan, Damon H. E. Tai (2009)

> Home

Details and statistics

DOI: 10.1080/00207720802645204

access: closed

type: Journal Article

metadata version: 2020-07-22

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/ijsysc/PanT09
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/ijsysc/PanT09
Jason Chao-Hsien Pan, Damon H. E. Tai:
Implementing virtual metrology for in-line quality control in semiconductor manufacturing. Int. J. Syst. Sci. 40(5): 461-470 (2009)

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.