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"Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on ..."

Cristian Ravariu, Florin Babarada (2011)

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DOI: 10.3991/IJOE.V7I2.1543

access: closed

type: Journal Article

metadata version: 2022-06-23

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Cristian Ravariu, Florin Babarada:
Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure. Int. J. Online Eng. 7(2): 36-39 (2011)

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