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"Effects of tool stiffness and infeed scheme on planarisation. (Integrated ..."

Libo Zhou, Jun Shimizu, Hiroshi Eda (2005)

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DOI: 10.1504/IJMTM.2005.007699

access: closed

type: Journal Article

metadata version: 2020-06-04

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  - https://dblp.org/rec/journals/ijmtm/ZhouSE05a
Libo Zhou, Jun Shimizu, Hiroshi Eda:
Effects of tool stiffness and infeed scheme on planarisation. (Integrated model for simulation of planarisation process). Int. J. Manuf. Technol. Manag. 7(5/6): 490-503 (2005)

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